Design and Development of a Bi –Metallic Based Micro Pump
نویسندگان
چکیده
Growing need for a variety of micro electro-mechanical systems necessitates advances in manufacturing technologies for high volume production at low cost. In this study, a mechanical micro pump actuator will be modelled using MEMS module of COMSOL simulation tool. The micro pump actuator will be based on bimetallic actuation which in-turn is based on the difference in the thermal expansion coefficients of materials. The objective of this study is to determine deflection and temperature characteristics for a range of applied voltage and varying size to optimize the values.
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